產品展示

KS-41B日本理音RION KS-41B液體粒子計數器

【簡單介紹】

日本理音RION KS-41B液體粒子計數器
Measures 0.1µm Particles in Photoresist, SOG and other solutions
0.07µm as Option（For measuring clear solutions such as UPW）

【詳細說明】

日本理音RION KS-41B液體粒子計數器 產地：日本

Measures 0.1µm Particles in Photoresist, SOG and other solutions
0.07µm as Option(For measuring clear solutions such as UPW)

< Specification >

Optical system	Light-scattering method
Light source	Diode pumped solid state laser (wavelength 532 nm, rated output 500 mW)
Materials of parts exposed to sample	Synthetic quartz, PFA
Size range	1 to 10 channels (Setting range 0.1µm to 0.5µm)
Sample flow rate	5 mL/min
Counting efficiency	50±10 %
Maximum particle number concentration	48 000 particles/mL (at 10 % coincidence loss for 0.1µm particles)
Power	DC12 V (supplied by KE-40B1)
Dimensions and weight	164 (H) x 464 (W) x 320 (D) mm (excluding protruding parts), Approx. 12.5 kg

聯系方式

上海民儀電子有限公司

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聯系人：蘭亞
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